The present invention provides a method for forming a black electrode by performing sintering at a temperature in the range of 500-600\xb0 C. The memory controller design tool suggests to 1) add logic to the memory controller to resolve the conflict, 2) incorporate a constraint that reduceseliminates command collisions, data conflicts, andor the need to check particular timing parameters, or 3) a combination of both. Each of the first sensing series includes a plurality of first transparent sensing pads disposed along a first direction, and a plurality of non-transparent bridge lines disposed along the first direction. The first cluster robot is configured to transfer wafers from the linear robot to the processing chambers, and configured to transfer wafers from the processing chambers to the linear robot. The fingers extend outward from the inner tube and are positioned along the entire length of the tubes, defining isolated air chambers which act as a thermal blanket, preventing cold air from passing into and hot air from exiting the inner tube. The fine channel device includes a storage space having a circular or polygonal recess for temporarily storing fluid, and supply channels formed in a radial direction from the storage space.