A lower electrode 60 in a region opposite each of pressure generation chambers 12 is formed to have a width smaller than the width of the corresponding pressure generation chamber 12, and an upper surface and an end surface of the lower electrode 60 in a region corresponding to each of the pressure generation chambers 12 is covered with a piezoelectric material layer 70. The method provides that, to initiate desulfation, the temperature of the catalyst is increased to the point where thermal desorption of the nitrogen oxides stored in the catalyst sets in, and the onset of thermal desorption of the nitrogen oxides is used as the signal to enrich the airfuel mixture to perform the desulfation. This system provides for loading a cassette with workpieces equipment, and at the same time an equipment server and a host refers to job schedules of the workpieces from a file server, and select workpieces to be processed by the equipment. The epitaxially deposited portions of the faceted semiconductor nanowire can apply stress to the channels. The lead system is either a fiber optic system or an electrically shielded electrical lead system.