A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. An offset compensating unit detects an offset voltage from an output voltage of the on-die termination control unit, stores the detected offset voltage in a capacitor, compares the capacitor voltage canceled the offset voltage with a preset reference voltage, and outputs the comparison result. When the first operating system stops, a list recording allocation of the peripheral devices is updated to switch the allocation to the second operating system. A script processor processes the scripts and generates a content document and a style document.