This invention relates to improved solutions comprising ascorbic acid. A photosensitive layer pattern including an organic polymer is then formed on the substrate to fill the preliminary hole. The drawer may be moved by a mechanical drive through a releasable connector. This gives some compliance to the flat zone for mitigation of stresses induced by tube growth. The substrate is positioned in an enclosure configured to shield an interior of the enclosure from electromagnetic fields exterior to the enclosure; and the substrate is etched in the enclosure, including removing a portion of the substrate to form a structure having at least a portion that is isolated andor suspended over the substrate.