In accordance with the present disclosure, disadvantages and problems associated with controlling signal transmission of a wireless communication device may be reduced. Link state topology exchanges provide each switch with network topology graphs to determine paths from source to destination end systems. Next, a second fluid which is more volatile than the process liquid is supplied to the upper surface of the substrate from the fluid nozzle, while the wafer is being rotated. Subsequently, a silicide is formed in the doped region. The other of the joining surfaces has a shape corresponding to that of the one thereof.