A diffraction grating includes a metallic base layer and layers of dielectric materials of varying refractive index, where a bottom interface of the layers is adherent to the metallic base layer. Each of the individual sheets cut from the first web is arranged to be guided and transferred onto the second web while the first web is being sucked onto an outer peripheral surface of the lower blade roll by the suction through suction holes formed in a first region on an outer peripheral surface of the lower blade roll. There is a gap between the enhancement implant region and the P-N junction. In the flexible base, the at least one reinforcement trace is disposed at a periphery of the working trace region.