A double-metallic deposition process is used whereby adjacent layers of different metals are deposited on a substrate. A plurality of horizontal support rods are affixed to primary panel at spaced intervals. The clamping system includes an actuator portion and an engaging portion coupled to the actuator portion. 5 to 40 m2g and a plurality of pore diameter peak tops in the pore distribution, and a producing method thereof; a niobium monoxide sintered body, which is obtained by sintering the above niobium monoxide powder and, having a plurality of pore diameter peak tops in a range of 0. A chip area is reduced and costs of a driving apparatus is reduced.