The present invention relates to an epitaxial wafer comprising single crystal silicon substrate and an epitaxial layer deposited thereon. The combination apparatus includes a first device, a second device and a connecting mechanism. The novel cross-linking reaction can occur at lower temperatures compared to typical cross-linking reactions and can occur in aqueous solutions that have a neutral to mildly alkaline pH of from 6 to 11. After provisioning the virtual compliance platform based on the predetermined configuration, the provisioning operations further deploys a compliance monitor.