An exposure device in which a device for insertion or removal of the microscope for mask marks is not necessary, and in which the arrangement of the device is simplified is achieved by the provision of a microscope for mask marks in a workpiece carrier which can move in unison with the workpiece carrier. The scanning system comprises a light-transmissive platen defining a top surface and a bottom surface, a controller, a document handler, and a scanner bar for recording image data from documents at various document heights. The APIs are provided by a device control module which may execute either on the host system or on the network processor. The upper surface electrodes on the one main surface are connected via the connection electrodes to lower surface electrodes, respectively, that are located on the other main surface and are connected to a circuit board. The sealing elements seal all the gap regions present between machine parts displaced relative to one another by revolving andor oscillating movements and not in direct contact. The bottom of the trench is filled with a doped polysilicon shield.