A method for converting interconnect parasitics of an interconnect network into slew dependent pin capacitances utilizes charge matching between predetermined voltage thresholds. The controller determines, based on the process control variables, the time required for the processing equipment to reach steady state conditions. A wavelength plate functions as a 2 plate with respect to the light beam L1, and functions as a n plate with respect to the light beam L2. The through-opening is sealed against the exterior circumferential face of the support arm, and the edge area of the cover is sealed against the receiving element.