A dosimetry system and method are provided for increasing utilization of an ion beam, wherein one or more side Faraday cups are positioned along a path of the ion beam and configured to sense a current thereof. A two process etch is performed to form side walls having a notched profile. grinding machines, includes a stationary unit, or stator and a rotating unit, or rotor, the latter being coupled, for instance, to the grinding wheel and rotating with it. The assessment circuit is connected to the receiver circuit and has an output to output a measured result. The actuator is constructed to have an oilless structure without oil supply, thereby always stably and rotationally driving the control shaft.