Infusion pumps according to the present invention maximize fluid throughput while minimizing vaporization of gas by employing specific flow path architecture, flow path dimensional ranges, and voltage and frequency ranges for activation of piezoelectric bodies. About 95% or greater of original PHA in cell mass is recovered, and the purity of PHA solids is about 97% or above. The basis component having the pressure detection component is closely placed between pivotal rods so that the detection unit can detect variation of electric properties of the pressure detection component to adjust the spacing between the pivotal rods, hence facilitating adjustment of the clamping force. A seeding layer is then selectively deposited on the capacitor portion of the sidewall.