Apparatus and method for achieving improved performance in a solid-state laser. The method further comprises providing a function corresponding to a relationship between a second color density and the color degree based on the first heating table and the second heating table, wherein the second heating time has a one-to-one relationship with the color degree, and the color degree has a one-to-one relationship with the second color density. Thus, it is possible to easily set an optimal condition of precharge executed before inspection of a pattern formed by a semiconductor apparatus manufacturing process and automatically inspection whether the precharge is good.