There is provided a method for electrically energizing and heating a platinum or platinum-alloy composite tube structure having a structure including a first main tube, a second main tube, and a branch tube connecting the first main tube and the second main tube, which prevents a local part of the branch tube from being electrically energized and heated in an excessive or insufficient manner. The latch bolt moves in a first plane to releaseably retain the striker. At least two patterns are interpolated to generate interpolated patterns in the sequence between the at least three original patterns. A valve member is located along the intermediate segment. warping of the wafer and provide a correction by maintaining a constant separation between the wafer and the extraction plate or adjusting the electrical bias of the wafer relative to the extraction bias. To first to fourth feeding sections 141a to 141d which are evenly placed on the same plane perpendicular to an axial direction of a main coaxial line 123, four microwaves shifted in phase by 0, 90, 180, and 270 are fed from first to fourth microwave supply sections 142a to 142d.