A distortion evaluating apparatus which can quantitatively evaluate distortion in a measurement object surface is provided. The heat dissipation plate is arranged on an upper part of the chassis. The instruction observed indicators and result output indicators are received by a trace unit that is configured to output conditional instruction trace data items and independently output conditional result trace data items enabling separate trace analysis of conditional instructions and corresponding conditional results by a diagnostic apparatus. A re-distribution layer is formed between the front surface of the semiconductor substrate and the second surface of the carrier substrate to route electrical signals between the imaging array and a second surface of the carrier substrate.