A device for equidistant mounting of fixtures with bracket rails, axles, mounting brackets, and fixture clamp assembly. In one embodiment a semiconductor component comprises a die having a semiconductor substrate and an integrated circuit. Because a large transistor-drive current does not flow to the input-side transmission line, the signal line can be made narrow and there is no increase in the required surface area even in the case of a coplanar line. Applications include dispersion compensation, pulse compression, and passband broadening in arrayed waveguide grating multiplexers and demultiplexers. Further, the plasma processing apparatus includes a plasma generating RF power supply section for supplying the RF power to a first load for generating a plasma of the processing gas; and a focus ring heating RF power supply section for supplying the RF power to a second load for heating the focus ring.