A method of cleaning a dual damascene structure includes forming a first conductive layer in a substrate. In one embodiment, a method is provided which may be performed in a computer system comprising a plurality of resources, a monitor for monitoring at least some of the plurality of resources, and an agent to configure resource groups, each resource group specifying a group of resources to be monitored by the monitor. 75, and having a length L and a total exposed surface area A exposed to the ambient air. The carry creation unit may create an ordered plurality of carry bits each corresponding to one or more of the generate and propagate bit pairs. The apparatus compiles retrieved salaries to generate a median salary, which is transmitted to a user device. A second sample spectrum is obtained.