Disclosed are: an apparatus which enables the easy production of liposomes having uniform particle diameters; and others. The apparatus includes a plurality of devices each having electrical properties that are dependent on a temperature of the device, a constant current source coupled to the plurality of devices, and a unit configured to output a signal based on an amount of voltage at by the plurality of devices. The resist is removed, and the MIMCap dielectric and top plate conductive material is deposited, forming a vertical MIMCap in regions.