The present invention is related to the field of semiconductor processing equipment and methods and provides, in particular, methods for the sustained, high-volume production of Group III-V compound semiconductor material suitable for fabrication of optic and electronic components, for use as substrates for epitaxial deposition, for wafers and so forth. The goniometer comprises frame, a measurement head movably adapted to the frame by a first linear movement unit, second linear movement unit and a tilting movement unit, for performing measurement at a measurement point. With condition combination, a sequential series of conditional branches based on complex conditions may be avoided and complex conditions can then be used for conditional execution. The fuelcoolant mixture circulates in a circuit system which has a mixture-conveying device, an anode chamber of a fuel cell and an ion exchanger. The write data path includes a data in buffer and data write muxes for providing data to the array IO blocks.