A liquid cleaning composition and method for removal of photoresist including an aliphatic alcohol. In the cam ring, there are provided a diagonal cam groove which drives the first and second group lens frames to zoom positions in stages, circumferential-direction cam grooves which hold each zoom position, and aperture cam grooves which drive the aperture ring. The prehole is enlarged by anisotropic etching to thereby form a through-hole. The used planarizing solution can be replaced with fresh planarizing solution by actively removing the used planarizing solution from the pad with a removing unit and depositing fresh planarizing solution onto the pad in the planarizing zone. Vertical context is maintained by adding a constant-offset look-ahead and look-back line above the primary diagonal focus area.