The present invention provides a lightweight shovel with a large scoop type blade, a plastic coated metal handle and a compact shock absorbing cartridge located between the distal end of the metal handle and a D-shaped handgrip so as to not interfere with the operation of the shovel. A substrate carrier is arranged to be drivingly rotatable about a substrate carrier axis. A plurality of assist gates are formed in the upper part of a p-type well through a gate oxide film.