The disclosure concerns a process ring for the wafer support pedestal of a toroidal source plasma immersion ion implantation reactor. Such byproducts of industrial processes for preparation of adipic acid and caprolactam, important intermediates in the production of various types of nylon, have hitherto largely been used only as fuels. In this joint, the number of the balls is six, and the pitches of the ball tracks are random, unequal and not less than 55 degree.