A probe of the present invention includes a beam portion cantilevered by a holding portion, and a contact extending perpendicularly to and downward from a free end of the beam portion. An electronic payment device configured according to the payment infrastructure is interrogated by a payment module of a first terminal to obtain financial data. The first electrodes and the third electrodes are insulated from each other and are horizontally interlaced. The silicon rich layer is located on the liner.