A chip with tri-layer electrodes and micro-cavity arrays for control of bioparticles and a manufacturing method thereof are revealed. In one example, the outlet of the lance is positioned below the surface of the molten metal. The system further includes a beam expander to expand a diameter of the incident laser beam received through the spatial filter, and a scan lens to focus the expanded incident laser beam at a target location on a work surface. Rotational phase differences of every plural photosensitive drums are set to a predetermined value in the state where rubbing with the belt is small.