A signal-carrying flexure structure for a MEM device comprises at least two conductive flexure segments having respective cross-sectional areas, and at least one crosspiece affixed to the flexure segments to operatively couple the segments together such that the flexure segments and crosspiece form a single flexure structure. The FEL apparatus accelerates free electrons by using a microwave supplied from a microwave source to irradiate an FEL beam and outputs a remaining microwave. This means is located at the vertex of front portions of rigid arms forming a v-shaped front of the support. An alternative model is provided for representing the hardware component for selected verification tests, and the interface module comprises a verification interface module which is responsive to switch criteria specified by the alternative model to switch in the alternative model in place of the component model.