A charged particle beam system, a sample processing method, and a semiconductor inspection system enable an accurate detection of a particle in a film without causing LMIS contamination and allow observation with an electron microscope quickly. These inventive nanostructures, which we refer to as \u201cnanowires\u201d, include single-crystalline homostructures as well as heterostructures of at least two single-crystalline materials having different chemical compositions. The coatings facilitate oxidation of deposited carbon, whereby carbon buildup can be stopped or reversed. A serial data stream is sequentially sampled with the I clock, and with the function-controlled varied phase delay Q clock, creating digital I-bit and varied phase delay Q-bit values, respectively. A cursor displayed within the display screen is responsive to movement of the bezel. This enables the use of a thinner gate dielectric film with silicon, nitrogen and oxygen as main constituent elements while at the same time realizing reduction in leakage currents.