RFID tag responses are detected by an RFID reader system. The parsing procedure is located in a parsing thread, which implements callback functions of a SAX parser and creates and executes the SAX parser. The ROM stores a plurality of programs and parameters required for processing the programs to the ROM. The adhesive secures the coverslip to a glass slide. A first marking section is recovered from the first sensor signal by the computing unit, and then, a first exclusion criterion for excluding the first stored marking section is determined from the recovered first marking section. The topcoat composition can be used to coat a photoresist layer on a material layer on a substrate, for example, a semiconductor chip.