An extreme ultraviolet light source apparatus provided with a magnetic field forming unit having sufficient capability of protection against ions radiated from plasma while using a relatively small magnetic source. The electronic control unit has a chassis incorporating a printed circuit board where electronic devices are mounted. The invention also relates to proteins encoded by such nucleic acid molecules as well as antibodies capable of recognizing these proteins. The angle of the linear structuring element which produces an eroded image having the greatest surface area is designated as the skew angle. The debonder is capable of reducing tensile strength by 40 percent or more by way of a quaternary ammonium surfactant component and a nonionic surfactant component.