A protective shield for protecting a feed nozzle encloses, not only the circumference of the feed nozzle, but also encloses and protects the end of the feed nozzle. The laminated body has a lower electrode, an upper electrode, and a piezoelectric film made of aluminum nitride which is provided between the lower electrode and the upper electrode and in which a c-axis is oriented almost perpendicularly to a film plane. The synthesizer generates a derived bit clock by dividing the fixed, high frequency local oscillator. A plate is disposed on the outer legs opposite the base.