A harmonic Q switch laser device and its control method for obtaining a stable laser pulse while protecting a nonlinear optical crystal used for a wavelength conversion are presented. The spring legs are arranged such that the three degrees of freedom enable a displacement possibility of the spring cup in a displacement plane and are linearly independently aligned in this displacement plane. When a main switch of the DC-DC converter is turned off, the auxiliary winding turns on the active switch, and then the transformer is reset by a resonance between a magnetizing inductor of the transformer and the resonant capacitor. An insulating layer is formed on the first conductive layer. 4 \u03bcm, the ruggedness region length may be about 1 \u03bcm and the source region length may be about 20 \u03bcm.