Systems, methods, software products test a memory cache of a processor that includes a test engine. Broadband antenna elements are coplanarly disposed on a suitable planar dielectric material. The conductive leads are bent and the circuitry and conductive wires are arranged and mounted such that the dimensions in a plane parallel to the sensor plane of the camera head are approximately equal to or less than the dimensions in the plane of the sensor. In another embodiment, the first superhard material may exhibit an average grain size that is smaller than an average grain size of the second superhard material. A body contact region of the second conductivity type having a high concentration is formed to surround the first trench by impurity ion implantation using the oxide layer pattern as an ion implantation mask.