Copper precursors useful for depositing copper or copper-containing films on substrates, e. A first drive is supported by a first element of the frame and is operatively connected to a spindle having a tool. Also included is a LS matrix database construction part in which a LS matrix is made based on the finish prediction result, and also constructs the data used in making the LS matrix, as a database, and a design rule generation part generating a design rule from the LS matrix. In one arrangement, the mechanism includes a plurality of guide legs having a reduced yield strength in comparison to the mounting legs.