1459934098-72f5f3f9-277d-4222-a3c9-98fdee52b0c3

A Pre-Aligned Metrology System comprising a number of Pre-Aligned Metrology Assemblies and Pre-Aligned Metrology Modules for measuring a target on a wafer. The second member is located apart from and adjacent to the first member. Adjusting the first portion with respect to the second portion adjusts a volume of air within the casing. The device includes piping tees and flexible tubing for connection to a sink’s water lines. The reloading machine is able to update the canister memory.