An evaporation donor substrate that makes it possible to evaporate only a desired evaporation material in the case of performing deposition by an evaporation method. The read circuit for the NAND flash memory device includes a NAND flash memory cell having multi-level information, a first page buffer for storing an upper-bit, a second page buffer for storing a lower bit, and pass transistor for changing information of the second page buffer according to a variation of the first page buffer. A valve door assembly including a flapper door is secured in the housing, and includes a seal between the flapper door and the housing. In an embodiment for a gate-all-around device, the cleaning process is applied to an oxide layer over an epitaxial portion of a fin. These methods process signals associated with desired, expected, or actual turn rate to determine if the wheelchair is off course.