A method is disclosed for inspecting a device imprint lithography template to detect defect particles of imprintable medium remaining on the patterned imprinting surface after an earlier imprint step. In one embodiment of the present invention, a circulator and a reflective element are placed at either end of a chain of cascaded processors. A trigger is operatively coupled to the air cartridge and configured to cause air to be released from the cartridge into the chamber when actuated. When the first and second clamp systems are disengaged from the pile and the first and second locking systems are disengaged from the structural member, the clamp displacement system may be operated to obtain a desired clamp distance between the first and second clamp assemblies. A time for setting the output frequency of the YIG oscillator is shortened to improve the stability of the output frequency thereof against environmental conditions. A support within the biasing mechanism secures three springs with the coils facing outward, one extension from each spring embedded in an upper support member and another extension movable within a plane tangential to a periphery of a lower support member and received by a hollow portion of one of the legs.