By proper selection of illumination configuration, mask transmission, and mask bias, complex patterns of contact holes may be imaged with sufficient latitude for manufacturing at minimum half-pitches of k1=0. It also includes a semiconductor chip received within the recess of the metal block and mounted on the metal block. The rotational position sensor senses rotation of the platter and provides a position signal indicative of the sense rotation of the platter. The initial voltage adjusting circuit adjusts and applies an initial voltage to the charging capacitor. Those methods may include forming a structure comprising a first contact metal disposed on a sourcedrain contact of a substrate, and a second contact metal disposed on a top surface of the first contact metal, wherein the second contact metal is disposed within an IID disposed on a top surface of a metal gate disposed on the substrate. The spectra generated by the local instrument can be compared to the calibrated library spectra to determine the elements in an unknown mineral.