1459938997-0d2c480a-b20c-44e9-996e-fe63447ed75d

The invention is directed to an arrangement for providing target material for the generation of short-wavelength electromagnetic radiation, in particular EUV radiation. The cam plate is rotatable through a first range in which the first pin slidably engages the cam edge to provide a first torque for rotating the latch plate and the member from a first position. Per-survivor-processing is one technique for adaptive sequence detection. If the geometric constraints cannot be satisfied, the movement of the first geometric entity is restricted. Multi-modal routing can be initiated as well to configure a route using the selected or adjusted waypoints and multiple modes of transportation in order to optimize the cost function.