An EGR faultfailure determination system for an internal combustion engine is operable to monitor a number of EGR system operational parameters and diagnose various EGR-related fault and failure statuses therefrom. A parameter referred to in pattern matching from a first stage until a predetermined stage among pattern matching of the plurality of stages is fixedly held in a fixed parameter holding unit. The fusion section fuses the probe to a silicon carbide wafer as an examined object. The oven is configured to operate in a radiant heat mode of operation, a microwave mode of operation, a dual mode of operation, and a self clean mode of operation.