A discharge wire usable in an electrification device includes a tungsten wire subjected to mirror finish processing and an oxidized layer formed by heating the surface of the tungsten wire at a temperature in the range 400 to 600 C. A first ferrule is fixed to an optical waveguide chip. The method may be performed automatically by the system or manually. The physical characteristic of the substrate carrier is then modified at one or more of the plurality of corresponding positions on the substrate carrier to obtain desired parameters of the deposited layers or fabricated devices as a function of position on the substrate carrier. The separator further diverts the gaseous component to the first pump and the liquid component to the second pump, wherein the first pump pumps the gaseous component back to the source and the second pump pumps the liquid component to a target.