An apparatus and a method for conditioning air in a plurality of spaced apart and thermally separated conditioned spaces with a cryogenic temperature control apparatus. The forward portion has a pair of front legs and a desktop support structure. Accordingly, in a first approach the standard process flow will be followed until reaching the point where contact openings and metal are to be processed. The shuttle valve includes an internal flow path having a venturi therein. Accordingly, it is possible to form an uniform microwave in the antenna, so that an uniform plasma can be produced in the processing container. The calibration circuit calculates each corrected digital value using no more than 2N+2 stored calibration coefficients.