Isotopically enriched silicon precursor compositions are disclosed, as useful in ion implantation to enhance performance of the ion implantation system, in relation to corresponding ion implantation lacking such isotopic enrichment of the silicon precursor composition. The device includes a housing including an exterior surface formed with an air inlet and an air outlet. Each prism has a refracting face for refracting the incident light and a reflecting face for reflecting the refracted light from the refracting face toward the emergence face of the substrate. and be useful as an attachment strip for temporary or permanent fastening.