Processes for producing tungsten nitride and tungsten nitride films are provided in which a tungsten carbonyl compound and a nitrogen-containing reactant gas are reacted at a temperature below about 600\xb0 C. The signal is received by one or more deployed RF receivers. Caches utilized by the GPU may be coherent with caches utilized by other CPUs in the computing system. Embodiments may also include creating document utilization information for the electronic document based on the aggregated usage indications and awarding usage credit to the user based on the user’s providing statistics on the usage of the electronic document. The use of ultrasound allows much shorter times in the methods. The brightness unit is consisted of a first cured surface and a second curved surface.