A key for entering computer related passwords via a mnemonic combination includes an electronic key with a communication means, a computer program, a storage unit, and a user interface. The reset driving unit includes a first reset drive IC for receiving a first reset data from a reset data supplying unit, a second reset drive IC for receiving a second reset data from the reset data supplying unit and a first switch connected to the first reset drive IC and turned onoff by the second reset drive IC. Secondly, forming a silicon dioxide layer on a surface of the silicon substrate. The support also includes a block having opposite ends, a finger portion formed at one end and a second shoulder formed at the opposite end. Further, the electrostatic chuck is connected to a high voltage DC power supply and includes an electrode film satisfying following conditions: \u03b4z\u226785 )12) and, a surface resistivity of the substrate>a surface resistivity of a central portion of the electrode film.