A test reticle having a pad and antenna structures with varying critical dimensions is provided to measure sidewall angles developing in the resist sidewalls of clear lines. A cap is formed integral with the base member and connected thereto by a hinge which facilitates pivoting motion of the cap relative to the base member. The separation layer prevents incompatible components of the resists from reacting with one another. The radial pieces carry internal shafts with bevel gears connected to the bevel gears assembled on vertical shafts mounted on blocks at the ends of the arms. The first and second controllers output signals based on input signals received over the first and second communication paths, respectively, and also based on stored control data. The composite substrate includes a supportive substrate having a top surface and a bottom surface non-parallel to the active layer; a metal substrate located under the supportive substrate; and a reflective layer located between the supportive substrate and the metal substrate.