A detection method of low frequency handshaking signal is described. The method of inspecting a photo-mask comprises performing destruction inspection with respect to the photo-mask for inspection, by using one of two photo-masks that have been successively manufactured under the same conditions that are set, as a photo-mask for inspection, and using the other of them as a product. An assembly of packages of the specialty shingles is provided, in a tray arrangement, and a pallet assembly of various levels of such packages disposed on a pallet are also provided. 0 to 50 g10 minutes; k2 LNR defined as a scale of neck-in upon film molding is in the range of 0. The adaptive parameter is generated from the samples and is used as an input to a threshold adjuster in a target detector.