A vertically-disposed pump shaft is supported by an upward force against the pump shaft during periods of non use of the pump thereby off-loading bearings normally supportive of the shaft to prevent damage thereto when the pump is moved. The mixture includes alkyl ether carboxylic acids andor salts having at least two different alkyl groups R1, an average carbon number of alkyl groups R1 of alkyl ether carboxylic acids andor salts in the mixture is from 10. The power device and the manufacturing method can simplify a packaging process by attaching the control IC chip on a chip pad of a lead frame using an insulating adhesive tape at a level with the transistor chip. A magnetic part surrounds the shaft to attract the shaft such that the fan blade hub can be fixed at a specific position. By using this polishing pad and dividing the swing width into ten, it is possible to keep the product of the integrated value of the relative linear velocity, the integrated value of the pressure, and the integrated value of the contact time at various points within the wafer surface within \xb130% of the mean value in each swing width under feasible swing conditions.