Infinitely variable motion control provides motion control without any requirement for changing gears or use of a clutch. In particular embodiments, the hierarchical information may be expressed as trees. The honeycomb structure has a partition walls thickness of 50 to 200 \u03bcm, a cell density of 40 to 150 cellscm2, and an average particle diameter of the silicon carbide as a framework of 3 to 40 \u03bcm. This first-order defect position correction formula has three terms, for the offset component, the magnification component, and the rotation component of the observation coordinate system with respect to the detection coordinate system. The floating gate electrode has a projection portion on the end portion thereof.