A mask layer having an opening is formed on a semiconductor substrate. The walking beam is coupled to a body of the vehicle by a transversely-extending arm. The high bias has sufficient energy to break the F\u2014Si bonds in the FSG.
Algorithmically generated prior art
A mask layer having an opening is formed on a semiconductor substrate. The walking beam is coupled to a body of the vehicle by a transversely-extending arm. The high bias has sufficient energy to break the F\u2014Si bonds in the FSG.