A delivery system for an endoluminal device including an introducer, the introducer having a distal end intended to remain outside a patient in use and a proximal end. Briefly described, in architecture, the system can be implemented as follows. The method further includes removing volatile species of the TIM, prior to lid placement on the electronic assembly. The carbide tip is easily replaced to keep the leading edge sharp. According to the present invention, a high aspect ratio shallow trench isolation region without voids can thus be achieved.