A liquid evaporation method and apparatus wherein the contamination of the heat transfer surfaces is avoided by using a special circulating fluid. The stacked device includes a CMOS PA die configured to receive a transmit input signal and to output an amplified transmit signal, and a RF coupler device configured to receive the amplified transmit signal, to output an antenna transmit signal, and to output an RF signal proportional to the antenna transmit signal. A well region and a drift region are formed in the substrate adjacent to one another.